Titanium nitride magnetron sputtering

Июль 31, 2022

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Titanium nitride magnetron sputtering

Содержание

2. Preparation Beam tube cleaned according to UHV practices. Vacuum fired at 450 C. Assembled into coating
3. Coating System 3
4. Coating System Overview of system with two Fermilab tubes. Gas introduction flange. Power and cooling connections.
5. Titanium Cathode Assembly Insertion of magnet string into Ti cathode.
6. The Coating Process Balance temperature, pressure, flow rate, and voltage to control deposition. Start with Argon
7. System Disassembly Nitrogen insertion tube attached to titanium cathode still inside chamber. Titanium cathode with nitrogen
8. Coating Complete Coating analysis coupons were inserted adjacent to production tubes. Finished Fermilab tube.
9. Installed in Main Injector One coated tube installed during Summer 2009 shutdown at MI-521. One uncoated
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Слайд 2

Preparation
Beam tube cleaned according to UHV practices.
Vacuum fired at 450 C.
Assembled

into
coating system.

Two Fermilab 6” OD tubes in process.

Слайд 3

Coating System
3

Слайд 4

Coating System
Overview of system with
two Fermilab tubes.
Gas introduction flange.
Power and

cooling connections.

Слайд 5

Titanium Cathode Assembly
Insertion of magnet string into Ti cathode.

Слайд 6

The Coating Process
Balance temperature, pressure, flow rate, and voltage to control

deposition.
Start with Argon only for pure Ti layer, then add Nitrogen.
Monitor voltage discharge characteristics, plasma color, and partial pressures on RGA to confirm process.
The Fermilab setup started at 200 C and 4 e-7 Torr and took less than an hour.
Balance tempe
Vacuum fired at 450 C.
Assembled into
coating system.

Argon plasma

Argon + Nitrogen plasma

Слайд 7

System Disassembly
Nitrogen insertion tube attached to titanium cathode still inside chamber.
Titanium

cathode with nitrogen distribution tube. Magnet string position indicated by discoloration.

Слайд 8

Coating Complete
Coating analysis coupons were inserted
adjacent to production tubes.
Finished Fermilab

tube.

Слайд 9

Installed in Main Injector
One coated tube installed during Summer 2009 shutdown

at MI-521.
One uncoated tube also installed, with electron cloud detectors on both.