Rubicon. System manual block mounter

Содержание

Слайд 2

Regarding the any case of accident and incidents occurred by customer’s

Regarding the any case of accident and incidents occurred by customer’s

program modification or parts change in this equipment, maker has no responsibility on this and will take counter-actions having discussion with customer. Please contact maker before do the modification and change works by customer.

INDEX


* Notice for Safety*
1. Machine Specification
2. Operation Board (Touch Panel)
3. Preparation for Operation
4. Manual Operation
5. Automatic Operation
6. Maintenance
7. PLC Program
8. PLC I/O
9. Electric Circuit Drawing
10. Entire Assembly Drawing
11. Partial Assembly Drawing(Part List)
12. Pneumatic Circuit Drawing

Слайд 3

* Notice for Safety*

* Notice for Safety*

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This manual is including information related to secure the safety. Please

This manual is including information related to secure the safety.

Please be fully aware of this manual before using the system.
1) Make sure people are stay out of working area of the machine before input power of system.
2) When the system is ceased for temporary blackout, the system is returning to the initial state. After restoring the power, system requires following the operation procedure.
3) Remove obstacles when system is operated as checking if water, dust and others are remained on the system. Regular checking of system is required as well.
4) System requires protection from impact and prohibits from using water and chemicals which need soft sponge and brush for cleaning.
5) When manual operating is required, please check whether intervention is found in each part or not and then perform the system.
6) System has to be powered off when repair work, inspection of other parts, system check-up, and JIG exchange are required.
7) Operating parts has to be regularly maintained with injection of oil and grease.
8) Do not treat machine with wet glove and put your hand on the machine during the automatic operation
9) Secure enough space when the machine is arranged after lay-out.
10) Prohibit other people to treat machine than technicians.
11) Do not operate machine rashly as the internal panel of system is considte of sensitive electronic parts.
12) Block the power completely when the machine is on setting.
13) Do not touch electricity panel and transmission without caution for prevention of electrocute during the raining season.
14) Do not put or touch your hand on each transmitted cylinder and slider.
15) Block the air first when each cylinder requires setting.
16) Check cooling water periodically to repair the water leak all the time.
17) Please contact Dineeng for any system inquires

General Safety Instructions

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1. Machine Specification

1. Machine Specification

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1. Device Composition and Specification 1. Device Overview This device allows

1. Device Composition and Specification


1. Device Overview
    This

device allows the set amount of wafer to attach to the washed and heated ceramic
2. Specification
  - The wafers that correspond to the device must be designed and produced within the combination range of 4” (Dia 100mm) , 6” (Dia 150mm) ,
and 8” (Dia 200mm).
  - The ceramic blocks that correspond to the device are as shown below.
     Ceramic Block : Dia 546 * 15t
3. Device portions Specification
 3.1 Frame
    Frame must be used with AL PROFILE, and the COVER must be used with the transparent uninterruptible acryl.
    Machine’s total SIZE 2300 * 2760 * 1970H
3.2 Pre-heating and Heating
    Pre-heating and heating portion’s block SIZE must correspond to the ceramic block Dia 546.
 3.3 PUSH  
    The cylinder is pushed for the loading of wafer.
     Design so that the structure is modifiable in to 4”, 6”, 8”.
 3.4 ELEVATOR
    AC Motor and Ball screw are operated up-and-down in accordance with the 2 cassette/ 50 wafer standard.
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3.5 WAFER FEED For transportation use the cylinder, and the transport


 3.5 WAFER FEED
    For transportation use the cylinder, and the transport

plate jig must be designed so that it is compatible to a combination of types
3.6 SPIN
    Rotational activity is run through AC Servo Motor 3rd stage, and each setting must be changeable.
    The spinning shaft is treated with aluminum hard anodizing.
3.7 ROTATING
    The rotation of wafer is carried out with the rotating cylinder, and vacuum adsorption
    The wafer attaching location is to be adjustable to the ceramic block’s size.
3.8 INDEX and MOUNTING
    The block SIZE must correspond with the ceramic block Dia 546.
    Decide the number of segmentation according to the ceramic block size.
   The heater should be set so that its maximum heating temperature is 150 degrees (Celsius)
3.9 STAMP
    Stamping is done with the air cylinder, and the wafer attachment location should be adjustable.
    Stamping must be done with special rubber pad(silicon) to realize pressure from the middle.
3.10 BAKING
     Heating(non-contact) the wafer at any time.
     Maximum temperature is 200 degrees(Celsius)
     The size of heater is produced with 8’’ standard.
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3.11 WAX DISPENSER Forward-backward transport is executed through step motor, up-down


3.11 WAX DISPENSER
      Forward-backward transport is executed through step motor, up-down

transport is run through air cylinder.
      The wax discharge uses the normal amount of discharge valve and compressor tank.
3.12 COOLING
     Cool water is circulated in the aluminum block to cool the ceramic block.
     The block SIZE must correspond with the ceramic block Dia 546.
The product’s damage is minimized by attaching the silicon pad on the cool press.
3.13 BLOCK FEED
     Use the Motor for the transportation of the ceramic block, and transport two ceramic blocks simultaneously with 2 arms.
     The opening, closing of the arm is done with the air cylinder.
3.14 Block Loading portion
    One block can load up to 4 cassettes, and manually loaded on the device if there is discrepancy. The loading portion is run with the static motor and transported up and down through the pitch sensor. The block cassette’s sensor detects ON/OFF, and the block transportation uses the motor.
3.15 Block Unloading portion
A block can be loaded with 4 per cassette, and unloaded manually when there is significant discrepancy. The unloading portion is run with the static motor and transported up and down through the pitch sensor. The block cassette’s sensor detects ON/OFF, and the block transportation uses the motor.
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4. Machine Information including Specifications 4.1 Machine Information - Size :


4. Machine Information including Specifications
 4.1 Machine Information
     - Size    

: 2300 * 2760 * 1970H (mm)
     - Cycle type : 20 - 30sec (to attach one wafer)
     - Ceramic Block   :　Dia 546 1
     - Wafer Feed : 2 cassettes (Max. 50 pcs) (4”, 6”, 8” shared)
     - Power supply : 480V, 50HZ, 3P,15KW
- Pneumatic supply :   5 - 6 bar.   filtered air.
     - FAN FILTER UNIT (HEPA FILTER), anti-static acrylic cover
4.2 Specifications of Components
      - Pneumatic parts   :　ＳＭＣ
　　- P L C            :  MITSUBISHI
      - SERVO MOTOR :  MITSUBISHI
- TOUCH PANEL : MITSUBISHI
- STEP MOTOR : AUTONICS
      - WAX Dispensing V/V :  SAEJONG (Korea)
      - Sensor             :  OMRON, AUTONICS
      - LM GUIDE          :  THK
      - Electrical Parts : LG, HANYOUNG, AUTONICS, OMRON
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2. OPREATION BOARD

2. OPREATION BOARD

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2-1 OPERATION BOARD 2. OPERATION BOARD - POWER : Turning the

2-1 OPERATION BOARD

2. OPERATION BOARD

- POWER : Turning the

device power On or Off .
- MANUAL/AUTO : Sets for Manual or Auto operation.
- AUTO START : Initiates automatic run.
- HOME/RESET : Moves to the initial point for manual operation.
- UNLOADING CASSETTE : Replace the cassette and press down once unloading cassette work is finished.
- LOADING CASSETTE : Replace the cassette and press down once unloading cassette work is finished.
- BAKE HEATER TEMP : Set the temperature of baking heater.
- PRE.HEATER TEMP : Set the temperature of preheat block.
- INDEX HEATER TEMP : Set the temperature of heating block.
- MAIN AIR : Check the value of MAIN AIR.
- Touch Panel Screen : Set or display the state of machine.
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2-2 MAIN MODE - WAFER WORK SELECT : Displays 4”, 6”

2-2 MAIN MODE

 - WAFER WORK SELECT : Displays 4”, 6”

and 8” wafer selected.
- SELECTED RECEIPE No. : Displays the recipe selected.
- BLOCK SELLECT : Moves to the block selection mode.
- BLOCK MOUNT COUNT : Displays the number of wafers to be attached to one block.
- CASSETTE WAFER WORK COUNT No. : Displays total number of wafers being processed.
- BLOCK MOUNT COUNT : Displays the number of blocks attached.
- HEATER ON/OFF : Sets On or Off of baker, preheater and heater.
- COOL SV ON/OFF : Sets On or Off of cooling plate sol valve.
* MANUAL : Moves to manual mode.
* RECEIPE SETUP : Moves to recipe setting mode.
* POSITION SETUP : Moves to mechanical location setting mode.
* ORIGIN CHECK : Moves to origin check mode.
- ALARM HISTORY : Moves to alarm history mode.
- REMOUNT MODE ON/OFF : Mounts one block when the machine is accidently interrupted.
- RESET : Resets the buzzer.
- BUZZER ON/OFF : Turns On or Off buzzer sound (melody).
* Displays set time and elapsing time of each process.
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2-3 BLOCK SELECT MODE * Sets the number of worked pieced

2-3 BLOCK SELECT MODE

 * Sets the number of worked

pieced and recipe in the red squared area.
- 4 INCH : Sets 4” wafer and number.
- 6 INCH : Sets 6” wafer and number.
- 8 INCH : Sets 8” wafer and number.
- RECEIPE : Sets the recipe for each size.
- WRITE : Saves the number of works for block, Wafer and recipe
- CASSETTE WAFER WORK COUNT. SET : Sets the total number of processed wafer.
- SELECTED RECEIPE No. : Displays set recipes.
- SELECTED BLOCK WAFER No. : Displays the wafer attached in one block.
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2-4 TIME SETUP MODE - WAX OUT DELAY TIME: Sets the

2-4 TIME SETUP MODE

- WAX OUT DELAY TIME: Sets the

wax discharge delay time right after spinning.
- WAX OUT TIME : Sets the time wax discharge.
- BAKE TIME : Sets the bake time for the wafer surface previously waxed.
- ROTE-PRESS TIME : Sets the time for pressing the wafer against the ceramic block in turnover unit.
- STAMP TIME : Sets the stamping time of wafer attached on the ceramic block.
- COOL-PRESS TIME : Sets cooling press time of the ceramic block attached with wafer.
- I/O MONITOR : Moves to the page where I/O can be verified.
- SPIN SET : Moves to spin setting mode.
* PARAMETER SET : Moves to parameter setting page.
* Recipe lock should be released to changed the value.
- How to release : Touch four stars in the screen above and enter the password to release it. Then the word LOCK under the stars will be changed to UNLOCK.
- How to change the password : Touch the yellow box under the blue arrows to move to Change Password page.
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2-5 PARAMETER SET MODE - HEFA FILTER CHANGE TIME SET :

2-5 PARAMETER SET MODE

- HEFA FILTER CHANGE TIME SET

: Replace the Hepa-filter once alarm occurs after the set period.
- LOADING E/V C/V 1,2 STOP TIME : Roller stops at the preset time.
- UNLOADING E/V C/V 1,2 STOP TIME : Roller stops at the preset time.
- COOL PRESS USE_SELECT : Set if the cooling press is used or not after moving wafer-attached ceramic block to cooling stage in auto mode.
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2-7 MANUAL SELECT MODE * ELEV&PUSHER&WAFER MOVE - Moves to the

2-7 MANUAL SELECT MODE

* ELEV&PUSHER&WAFER MOVE
- Moves to

the manual mode for pusher, elevator and wafer transfer.
* WAX & SPIN
- Moves to the manual mode for wax dispenser and spin.
* BAKE & ROTATION
- Moves to the manual mode for bake and turnover.
* STAMP & INDEX
- Moves to the manual mode for stamp, stamp transfer and index.
* CLAMP BLOCK MOVE
- Moves to the manual mode for clamp and block.
* L/D-U/L BLOCK ELEVATOR
- Moves to the manual mode for loading and unloading stage.
** Red dots on the right of all manual buttons indicate the current location.
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2-8 ELEV & PUSHER MANUAL * PUSHER ASSY : Pushed the

2-8 ELEV & PUSHER MANUAL

* PUSHER ASSY : Pushed

the stacked wafer in the cassette.
 - FORWARD : Moves pusher forward.
- BACKWARD : Moves pusher backward.
* LD ELEV : Stacks cassettes in two stories and move them up or down at a pitch.
- UP/(ORG) : Moves to initial location by lifting the elevator.
- 1SLOT POS DOWN : Moves to the first position.
- 26SLOT POS DOWN : It is used at 25th position and moves to 26th position.
- PITCH UP : Lifts 1 pitch.
- PITCH DOWN : Lowers 1 pitch.
- STOP : Stops the elevator regardless of the pitch.
-> SLOT POS: Displays the location of current cassette slot.
-> CURRENT POS : Displays the location of current cassett.
* WAFER MOVE : Pushed wafer can be moved to spinning or turnover unit.
- FORWARD : Moves Wafer transfer forward.
- BACKWARD : Moves Wafer transfer backward.
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2-9 WAX & SPIN MANUAL * WAX DISPENSE : The wax

2-9 WAX & SPIN MANUAL

* WAX DISPENSE :

The wax transferred from the tank can be discharged here.
 - FORWARD : Moves wax dispenser to the left.
- BACKWARD : Moves was dispenser to the right.
- UP : Moves wax dispenser up.
- DOWN : Moves was dispenser down.
- WAX TIME DROP : Discharges the was for the set period of time.
- WAX TEST : Was is keep discharged while the button is pressed.
* SPIN ASSY : The wax discharged to the Wafer is rotated in 3-step for coating.
- UP : Moves the spin up.
- DOWN : Moves the spin down.
- VACUUM ON/OFF : Turns spin chuck on or off.
- STOP : Spinning stops at pressing this.
- 1CYCLE START : Activate one cycle of spin.
- SPIN HOME : Homing of servo motor for spin driver.
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2-10 BAKE & ROTATION MANUAL * BAKE : Wax coated wafer

2-10 BAKE & ROTATION MANUAL

* BAKE : Wax

coated wafer can be baked.
 - FORWARD : Moves the bake to the left.
- BACKWARD : Moves the bake to the right.
* ROTATION ASSY : Baked wafer is attached to ceramic block.
- UP : Moves turnover up.
- DOWN : Moves turnover down.
-TURN : Turnover arm swings to the ceramic block.
- RETURN : Turnover arm returns home.
- VACUUM ON/OFF : Turns turnover chuck vacuum on or off.
- HOME : Moves turnover home(origin).
- BACKWARD : Moves turnover to the baker.
- FORWARD : Moves turnover forward.
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2-11 PRESS & INDEX MANUAL * STAMP : Stamps the attached

2-11 PRESS & INDEX MANUAL

* STAMP : Stamps

the attached wafer ceramic block down at a constant pressure.
 - UP : Moves the stamp up.
- DOWN : Moves the stamp down.
- STOP : Stops the stamp.
- HOME : Moves the stamp home.
- FORWARD: Moves the stamp to the mounting point.
- BACKWARD : Moves the stamp to standby position.
* INDEX : Rotates the ceramic block at a set interval.
- INDEX UP : Moves ceramic block up.
- INDEX DOWN : Moves ceramic block down.
- INDEX ROTATION : Rotates lifted ceramic block at a set interval.
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2-12 CLAMP & BLOCK MOVE MANUAL * PRE-HEAT : Preheats Ceramic

2-12 CLAMP & BLOCK MOVE MANUAL

* PRE-HEAT : Preheats

Ceramic block.
 - PREHEAT UP : Moves the block up.
- PREHEAT DOWN : Lower the block down.
- BLOCK CLAMP : Clamps the block.
- BLOCK UNCLAMP : Unclamps the block.
* INDEX : Preheated block can be heated up and attached at an interval.
- INDEX UP : Lifts the block up.
- INDEX DOWN : Lower the block down.
- BLOCK CLAMP : Clamps the block.
- BLOCK UNCLAMP : Unclamps the block.
* COOL-PRESS : Wafer-attached and moved ceramic block is cooling pressed.
- UP : Lifts the Cooling press up.
- DOWN : Lower the Cooling press down.
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* COOL UNDER: The ceramic block with wafer attached and moved

* COOL UNDER: The ceramic block with wafer attached and

moved is cooled down by means of water cooling system.
 - UP : Lifts the block up.
- DOWN : Lowers the block down.
* BLCOK ASSY MOVE : Moves preheated block to the heater and mounted block to the cooler.
- FORWARD : Moves block transfer to the left.
- BACKWARD : Moves block transfer to the right.
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2-13 BLOCK L/D-U/L MANUAL * BLOCK UNLOADING : Finished ceramic block

2-13 BLOCK L/D-U/L MANUAL

* BLOCK UNLOADING : Finished ceramic

block is removed.
- DOWN(HOME) : Lowers unloading elevator down (origin).
- UP : Lifts unloading elevator upper most point (limit).
- PITCH UP : Lifts unloading elevator up by a pitch.
- STOP : Stops unloading elevator.
- CV-1ON : Starts unloader conveyor.
- CV-1OFF : Stops unloader conveyor.
- CV-2ON : Starts unloader conveyor.
- CV-2OFF : Stops unloader conveyor.
- U/L CYL”UP : Lifts the conveyor cylinder of unloader up.
- U/L CYL”DOWN : Lowers the conveyor cylinder of unloader down.
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* BLOCK LODING : The new ceramic block is inserted here.

* BLOCK LODING : The new ceramic block is inserted here.

- UP(HOME) : Lifts loading elevator up (home).
- PITCH UP : Lifts loading elevator up by a pitch.
- PITCH DOWN : Lowers loading elevator by a pitch.
- STOP : Stops loading elevator from the running.
- CV-1ON : Starts loader conveyor.
- CV-1OFF : Stops loader conveyor.
- CV-2ON : Starts loader conveyor.
- CV-2OFF : Stops loader conveyor.
- L/D CYL”UP : Lifts loader conveyor cylinder up.
- L/D CYL”DOWN : Lowers loader conveyor cylinder down.
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2-14 ROTATE ARM POS SETTING MODE - HOME : Moves turnover

2-14 ROTATE ARM POS SETTING MODE

- HOME : Moves

turnover home.  
- FORWARD : Moves turnover forward position.
- BACKWARD : Moves turnover to set standby position.
* ROTATE ARM FORWARD POSITION SET
- 4” BLOCK : Sets 4” attachment position.
- 6” BLOCK : Sets 6” attachment position.
- 8” BLOCK : Sets 8” attachment position.
* ROTATE ARM BACKWARD POSITION SET
- ROTATE BACKWARD : Sets standby position(baking) of turnover arm
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2-15 STAMP PRESS POS SETTING MODE - PRESS HOME : Moves

2-15 STAMP PRESS POS SETTING MODE

- PRESS HOME :

Moves stamp home.
 - STAMP POS : Moves stamp to the set position.
- BACK POS : Moves stamp to set standby position.
* STAMP PRESS FORWARD POS SET
- 4” BLOCK : Sets 4” attachment position.
- 6” BLOCK : Sets 6” attachment position.
- 8” BLOCK : Sets 8” attachment position.
* STAMP BACKWARD POS SET
- STAMP BACKWARD : Sets 4, 6 and 8” standby position.
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2-16 INDEX POS SETTING MODE - INDEX SPEED SET : Sets

2-16 INDEX POS SETTING MODE

- INDEX SPEED SET :

Sets index speed.
- : Rotates lifted Ceramic block by a preset interval.
- HOME : Starts homing of stepping driving motor for indexing.
- CURRENT POS : Displays the present location.
- CURRNET SPEED : Displays rotation velocity.
- ERROR CODE : Displays numbers (code) at motor error.
- JOG+ : Rotates it counterclockwise.
- JOG- : Rotates it clockwise.
* INDEX POSITION SET
(1ROTATION = 360° = 10,000PULSE)/wafer number per block.
2 EA : 5000 3 EA : 3333 4 EA : 2500 5 EA : 2000 6 EA : 1667 7EA :1429
8 EA : 1250 9 EA : 1111 10EA : 1000 11 EA : 909 12EA : 833 13EA : 769
14EA : 714 15EA : 667 16EA :625 17EA : 588 18EA : 555 19EA : 526
20EA : 500 21EA : 476 22EA : 454 23EA : 435 24EA : 417
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2-17 WAX ARM POS SETTING MODE - 4” FORWARD POS :

2-17 WAX ARM POS SETTING MODE

- 4” FORWARD

POS : Sets forward position and velocity for 4”.
 - 4” BACKWARD POS : Sets backward position and velocity for 4”.
- 6” FORWARD POS : Sets forward position and velocity for 6”.
- 6” BACKWARD POS : Sets backward position and velocity for 6”.
- 8” FORWARD POS : Sets forward position and velocity for 8”.
- 8” BACKWARD POS : Sets backward position and velocity for 8”.
- WAX ARM WAIT POS : Sets waiting position of WAX ARM and the velocity.
* FORWARD : WAX ARM moves forward.
* BACKWARD : WAX ARM moves backward.
* WAX ARM HOME : Moves WAX ARM home.
* WAIT POSITION : Moves WAX ARM to Waiting position.
- CURRENT POS : Displays the present position.
- CURRENT SPEED : Displays moving velocity.
- ERROR CODE : Displays numbers (code) at motor error.
- JOG+ : Moves forward. - JOG- : Moves backward.
- JOG LOW/HIGH : JOG motion velocity can be set for slower or faster.
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2-18 ELEV POS SETTING MODE - ELEV HOME : Moves elevator

2-18 ELEV POS SETTING MODE

- ELEV HOME : Moves elevator

home.  
- 1SLOT POS DOWN : Moves elevator to cassette #1 point.
- 26SLOT POS DOWN : Moves elevator to cassette #26 point.
- 1PITCH UP : Lifts elevator up by one cassette pitch.
- 1PITCH DOWN : Lowers elevator down by one cassette pitch.
* LD ELEV 1SLOT DOWN POSITION SET
- 4” 1SLOT POSITION : Specifies #1 cassette point for 4”.
- 6” 1SLOT POSITION : Specifies #1 cassette point for 6”.
- 8” 1SLOT POSITION : Specifies #1 cassette point for 8”.
* LD ELEV 26SLOT DOWN POSITION SET
- 4” 26SLOT POSITION : Specifies #26 cassette point for 4”.
- 6” 26SLOT POSITION : Specifies #26 cassette point for 6”.
- 8” 26SLOT POSITION : Specifies #26 cassette point for 8”.
* LD ELEV PITCH POSITION SET
- 4” PITCH POSITION : Specifies one pitch’s values for 4”.
- 6” PITCH POSITION : Specifies one pitch’s values for 6”.
- 8” PITCH POSITION : Specifies one pitch’s values for 8”.
Слайд 30

2-19 SPIN SET MODE - HOME : Performs homing of servo

2-19 SPIN SET MODE

- HOME : Performs homing of

servo driver for spin.
 - 1CYCLE START : Performs one cycle of spin.
- CURRENT SPEED : Displays the velocity of spinning.
- CURRENT POS : Displays the present location.
* The value for step 4’s stop position should be greater than that of step 3th end position. It stops at the origin if red underlined value is even number. It stops at 180 degreed point if the value is odd number.

- VACUUM ON/OFF : Turns spin chuck’s vacuum on or off.
- UP : Lifts spin up.
- DOWN : Lowers spin down.
- TIME SETUP : Moves to time setting mode.
- RECEIPE : Displays the recipe currently applied.

Слайд 31

2-20 ALARM HISTORY MODE - Displays the history of alarm (Date

2-20 ALARM HISTORY MODE

- Displays the history of alarm (Date

and Time)
- Can delete all or selected history
Слайд 32

2-21 RECEIPE & POS PASSWORD - Touch number box of screen allows to change the password.

2-21 RECEIPE & POS PASSWORD

- Touch number box of screen

allows to change the password.
Слайд 33

2-22 POSITION MODE PASSWARD INPUT - Entering position setting mode requires

2-22 POSITION MODE PASSWARD INPUT

- Entering position setting mode requires

password
Touch four yellow stars of screen allow to enter password
Same password is used for recipe
- Once change the password, it will be applied for recipe menu as well
Слайд 34

2-23 INPUT MONITOR Displays INPUT content and ON/OFF Condition

2-23 INPUT MONITOR

Displays INPUT
content and ON/OFF Condition

Слайд 35

2-24 OUPUT MONITOR Displays OUTPUT content and ON/OFF Condition.

2-24 OUPUT MONITOR
Displays OUTPUT content and ON/OFF Condition.  

Слайд 36

2-25 ALARM * Mark the respective alarm contents on the main

2-25 ALARM

* Mark the respective alarm contents on

the main mode.
- BZ ON/OFF : Set the Boozer (melody) ON/OFF.
- RESET : RESET the alarm.
* EMERGENCY STOP
- Situation where the emergency button has been pressed, and can be cancelled by turning the button to the right
- Remove the dangerous factors at manual mode and RESET.
* SPIN SERVO CONTROLLER ERROR
- When there is an error on the motor of the spinning portion, the alarm number of the servo motor driver at the reverse side of the device must be checked and consulted with the producer.
* BLOCK MOVE INVERTER ERROR
- The error from the inverter which drives the motor when the block is transported left-right. The inverter alarm number is checked in the manual(pamphlet).
* BAKE TEMP ALARM
- When the bake heater’s temperature is lower or higher than the set AL-H, AL- L, press BZ OFF until the temperature reaches the goal temperature, and check whether the temperature has gone up.
* PREHEAT TEMP ALARM
- When the pre-heater’s temperature is lower or higher than the set AL-H, AL- L, press BZ OFF until the temperature reaches the goal temperature, and check whether the temperature has gone up.
* STAMP INDEX TEMP ALARM
- When the index heater’s temperature is lower or higher than the set AL-H, AL-L, press BZ OFF until the temperature reaches the goal temperature, and check whether the temperature has gone up.
* INDEX(AXIS1) POS UNIT ERROR
- Check the stepping motor error that rotates the index, and the error code in the setting mode, and then RESET before reporting to the producer and receive action
* ROTATE ARM(AXIS2)POS UNIT ERROR
- Check the stepping motor error that drives the rotation’s forward-backward location and the error code from the setting mode, and then RESET before reporting to the producer and receive action
Слайд 37

* STAMP(AXIS3) POS UNIT ERROR - Check the stepping motor error

* STAMP(AXIS3) POS UNIT ERROR
- Check the stepping

motor error that drives the stamp’s forward-backward location and the error code from the setting mode, and then RESET before reporting to the producer and receive action
* SPIN(AXIS4) POS UNIT ERROR
- For the spinning servo motor’s error in MANUAL mode, press HOME/RESET for a long time to get the starting point to proceed.
* WAFER FULL WORK FINISH
- Transport the elevator to the starting point when using all 50 cassettes of the Wafers.
After transporting and exchanging the wafer cassette, if the START button is pressed for a long time it will automatically proceed.
* PUSHER FRW CY TIME OVER
- Alarm generated due to the excess of time elapsed during the forward progress of the pusher cylinder. If there are any obstacles during the forward progress remove them, check the air supply status and adjust the speed using the speed cone. *
*PUSHER BACK CY TIME OVER
- Alarm generated due to the excess of time elapsed during the backward progress of the pusher cylinder. If there are any obstacles during the backward progress remove them, check the air supply status and adjust the speed using the speed cone.
* WAX UP/DOWN CY UP TIME OVER
- Alarm generated due to the excess of time elapsed during the ascent of wax dispenser cylinder. If there are any obstacles during the ascent, remove the obstacle, check the air supply status, and adjust the speed using the speed cone.
* WAX UP/DOWN CY DOWN TIME OVER
- Alarm generated due to the excess of time elapsed during the descent of wax dispenser cylinder. If there are any obstacles during the descent, remove the obstacle, check the air supply status, and adjust the speed using the speed cone.
* SPIN VACUUM TIME OVER
- Alarm generated when the spin CY level of vacuum goes lower than the certain level of vacuum on the wafer. If deemed that the wafer is still useable press RETRY and during the process if the wafer gets damaged, stop the process and reset it.
Слайд 38

* ROTATE ASSY CY UP TIME OVER - Alarm generated due

* ROTATE ASSY CY UP TIME OVER
- Alarm generated

due to the excess of time elapsed when the rotation ASSY rises. If there is an obstacle during the rise, remove it, check the air supply status and adjust the speed using the speed cone.
* WAFER T/F CY FRW TIME OVER
- Alarm generated due to the excess of time elapsed when the wafer transfer cylinder goes forward. If there is an obstacle during the forward progress, remove it and check the air supply status and adjust the speed using the speed cone.
* WAFER T/F CY BACK TIME OVER
- Alarm generated due to the excess of time elapsed when the wafer transfer cylinder goes backward. If there is an obstacle during the backward progress, remove it and check the air supply status and adjust the speed using the speed cone.
* SPIN CY UP TIME OVER
- Alarm generated due to the excess of time elapsed when the spin CY rises. If there is an obstacle during the rise, remove it, check the air supply and adjust the speed using the speed cone.
* SPIN CY DOWN TIME OVER
- Alarm generated due to the excess of time elapsed when the spin CY descends. If there is an obstacle during the descent, remove it, check the air supply and adjust the speed using the speed cone.
* ROTATE ASSY CY DOWN TIME OVER
- Alarm generated due to the excess of time elapsed when the rotation descends. If there is an obstacle during the descent, remove it, check the air supply and adjust the speed using the speed cone.
* ROTATE ASSY TURN TIME OVER
- Alarm generated due to the excess of time elapsed when the rotation turns. If there is an obstacle during the turn, remove it, check the air supply and adjust the speed using the speed cone.
* ROTATE ASSY RETURN TIME OVER
- Alarm generated due to the excess of time elapsed when the rotation returns. If there is an obstacle during the return, remove it, check the air supply and adjust the speed using the speed cone.
* ROTATE ASSY VACUUM TIME OVER
Alarm generated when the rotation CY has the wafer at a vacuum level lower than a certain level. If the wafer is deemed to be useful RETRY, but if not, press the emergency stop to initialize the device and re-use it.
Слайд 39

* STAMP PRESS DOWN TIME OVER - Alarm generated due to

* STAMP PRESS DOWN TIME OVER
- Alarm generated due

to the excess of time elapsed when the stamp press cylinder descends. If there is any obstacle during the descent, remove it, check the air supply status, and adjust the speed using the speed cone..
* INDEX CY UP TIME OVER
- Alarm generated due to the excess of time elapsed when the index cylinder rises. If there is any obstacle during the rise, remove it, check the air supply status, and adjust the speed using the speed cone.
* INDEX CY DOWN TIME OVER
- Alarm generated due to the excess of time elapsed when the index cylinder descends. If there is any obstacle during the descent, remove it, check the air supply status and adjust the speed using the speed cone.
* PREHEAT UNDER CY UP TIME OVER
Alarm generated due to the excess of time elapsed when the single stage cylinder under the pre-heater portion rises. If there is any obstacle during the rise, remove it, check the air supply status and adjust the speed using the speed cone.
* PREHEAT UNDER CY DOWN TIME OVER
Alarm generated due to the excess of time elapsed when the single stage cylinder under the pre-heater portion descends. If there is any obstacle during the descent, remove it, check the air supply status and adjust the speed using the speed cone.
* PREHEAT CLAMP CLAMP TIME OVER
- Alarm generated due to the excess of time elapsed when the pre-heat clamp cylinder clamped. If there is any obstacle during the clamp, remove it, check the air supply status, and adjust the speed using the speed cone.
* PREHEAT CLAMP UNCLAMP TIME OVER
- Alarm generated due to the excess of time elapsed when the pre-heat clamp cylinder unclamped. If there is any obstacle during the unclamp, remove it, check the air supply status, and adjust the speed using the speed cone.
* STAMP INDEX CLAMP CLAMP TIME OVER
- Alarm generated due to the excess of time elapsed when the index clamp cylinder clamped. If there is any obstacle during the clamp, remove it, check the air supply status, and adjust the speed using the speed cone.
* STAMP INDEX CLAMP UNCLAMP TIME OVER
- Alarm generated due to the excess of time elapsed when the index clamp cylinder unclamped. If there is any obstacle during the unclamp, remove it, check the air supply status, and adjust the speed using the speed cone.
Слайд 40

* BAKE CY FRW TIME OVER - Alarm generated due to

* BAKE CY FRW TIME OVER
- Alarm generated due

to the excess of time elapsed during the forward progress of the baking cylinder. If there is any obstacle during the forward progress, check the air supply status and adjust the speed using the speed cone.
* BAKE CY BACK TIME OVER
- Alarm generated due to the excess of time elapsed during the backward progress of the baking cylinder. If there is any obstacle during the backward progress, check the air supply status and adjust the speed using the speed cone.
* WAX TANK WAX LEVEL LOW
- Alarm generated when the amount of wax in the wax tank is insufficient.
If wax is reinforced, the alarm disappears.
* ELEV(AXIS6)POS UNIT ERROR
- Error from the wafer elevator motor.
Turn off the device, and restart after 1 minute. Press the HOME/RESET button check the initial point, and contact the producer if problem occurs.
* COOL PRESS CY DOWN TIME OVER
- Alarm generated due to the excess of time when the cool press cylinder descends. If there is any obstacle during the descent, check the air supply status and adjust the speed using the speed cone.
* COOL PRESS CY UP TIME OVER
- Alarm generated due to the excess of time when the cool press cylinder ascends. If there is any obstacle during the ascent, check the air supply status and adjust the speed using the speed cone.
* COOL INDER CY UP TIME OVER
- Alarm generated due to the excess of time when the cool lower cylinder rises. If there is any obstacle during the rise, check the air supply status and adjust the speed using the speed cone.
* COOL UNDER CY DOWN TIME OVER
- Alarm generated due to the excess of time when the cool lower cylinder descends. If there is any obstacle during the descent, check the air supply status and adjust the speed using the speed cone.
Слайд 41

* BLOCK U/L INV#3 ERROR - Error from the loading portion

* BLOCK U/L INV#3 ERROR
- Error from the loading

portion motor.
Turn off the device and turn it on 1 minute later and then press the HOME/RESET button on the touch panel to initialize the device. If the same problem occurs contact the producer.
* BLOCK L/D UNDER CYL” UP TIME OVER
- Alarm generated due to the excess of time elapsed when the loading portion lower CY rises. If there is any obstacle during the rise, remove it, check the air supply status and adjust the speed by using the speed cone.
* BLOCK L/D UNDER CYL” DOWN TIME OVER
- Alarm generated due to the excess of time elapsed when the loading portion lower CY descends. If there is any obstacle during the descent, remove it, check the air supply status and adjust the speed by using the speed cone.
* BLOCK U/L UNDER CYL” UP TIME OVER
- Alarm generated due to the excess of time elapsed when the unloading portion lower CY ascends. If there is any obstacle during the ascent, check the air supply status and adjust the speed using the speed cone.
* BLOCK U/L UNDER CYL” DOWN TIME OVER
- Alarm generated due to the excess of time elapsed when the unloading portion lower CY descends. If there is any obstacle during the descent, check the air supply status and adjust the speed using the speed cone.
* BLOCK L/D ELEVATOR BLOCK WORK FINISH
- Alarm generated when the loading portion elevator work is complete.
Fill the empty cassette with the ceramic block, and press the loading cassette button and RESET the device.
* BLOCK U/L ELEVATOR BLOCK FULL
- Alarm generated when the unloading portion elevator work is complete.
Fill the empty cassette with the ceramic block, and press the unloading cassette button and RESET the device.
* BLOCK L/D INN#2 ERROR
- Error caused by the loading motor
Turn off the device and turn it on 1 minute later and press the HOME/RESET button on the touch panel to initialize the device. If the same problem occurs, contact the producer.
Слайд 42

* CASSETTE WAFER LOT WORK FINISH - Alarm generated after all

* CASSETTE WAFER LOT WORK FINISH
- Alarm generated after

all work is complete.
Remove the filled block and let it REST. Since the device cannot be restarted after this alarm is generated, press the HOME/RESET button for 3 seconds to initialize.
* WAFER ELEV WAFER NOT SENSING
- Error caused when the wafer detecting sensor cannot detect the wafer.
If the wafer does not ride the guide and therefore divert, set the wafer on the wafer guide and press the WAFER CHECK OK button. If there isn’t any wafer, press the initializing button and insert the cassette which has the wafer filled, and press the START button on the touch panel.
* SPIN TARGET POS SETTING VALUE LOW
- Error that arises when the goal location value to be rotated is lower than the expected value.
Execute the test starting from 1 cycle, and step 4 goal location value must be used after modification.
* ELEV LOWER LIMIT SENSOR ERROR
- Error that arises when the lower wafer elevator sensor is under detection.
As a sensor that is inputted so that the value does not get lower, if the alarm is generated contact the producer.
* HEFA FILTER CHANGE TIME UP
- Alarm that is generated when the HEFA filter using time has reached its limit.
Reset the time setting before use if the resetting of the HEFA filter after checking its status is viable. If it needs to be exchanged contact the producer (repurchase).
* BLOCK & WAFER No. MISSMATCH
- Alarm that goes off when the amount of wafer attached on one block is not identical with the inputted value for the wafer work. Set the total amount of wafer to be worked on as a multiple of the wafer amount attached on one block.
* LD DOOR UP TIME OVER
- Alarm that is generated when the acryl door on the cassette’s loading portion does not detect the upper sensor. If there is any obstacle, remove it, check the air supply status and adjust the speed using the speed cone.
Слайд 43

* LD DOOR DOWN TIME OVER Alarm that is generated when

* LD DOOR DOWN TIME OVER
Alarm that is generated

when the loading portion cassette of the acryl door does not detect the lower sensor.
If there is any obstacle remove it, check the air supply status and adjust the speed using the speed cone.
* LD STOPPER UP TIME OVER
- Alarm that sets off when the upper sensor of the stopper that fixes the loading portion cassette is not detected. If there is an obstacle remove it, check the air supply status and adjust the speed using the speed cone.
* LD STOPPER DOWN TIME OVER
- Alarm that sets off when the lower sensor of the stopper that fixes the loading portion cassette is not detected. If there is an obstacle remove it, check the air supply status and adjust the speed using the speed cone.
* UL DOOR UP TIME OVER
- Alarm that sets off when the upper sensor of the acryl door on the unloading portion cassette is not detected. If there is an obstacle remove it, check the air supply status and adjust the speed using the speed cone.
* UL DOOR DOWN TIME OVER
- Alarm that sets off when the lower sensor of the acryl door on the unloading portion cassette is not detected. If there is an obstacle remove it, check the air supply status and adjust the speed using the speed cone.
* UL STOPPER UP TIME OVER
- Alarm that sets off when the upper sensor of the stopper that fixes the unloading portion cassette is not detected. If there is an obstacle remove it, check the air supply status and adjust the speed with the speed cone.
* UL STOPPER DOWN TIME OVER
- Alarm that sets off when the lower sensor of the stopper that fixes the unloading cassette is not detected. If there is an obstacle remove it, check the air supply status and adjust the speed using the speed cone.
Слайд 44

*** If there is a TIME OVER alarm set off, check


*** If there is a TIME OVER alarm set off, check

the air supply status, and use the respective cylinder speed cone to adjust the transfer speed. Also, check if the respective cylinder sensor of the cylinder is lit in red in a normal fashion, and exchange it if there is any problem.
*** If there is motor error check the error code and RESET the device. If repetitive error is occurred, turn off the device let it rest for about 3 minutes before turning it back on to see whether it still has the error. If the error continues consult with the producer.
Слайд 45

3. Preparation of Operation

3. Preparation of Operation

Слайд 46

3. Preparation of Operation A. POWER ON *** Please follow below

3. Preparation of Operation
A. POWER ON
*** Please follow below sequence for

Power On Operation
① Set 1st power breaker on (Factory Power)
② Set NFB ON at the system control panel
③ Set each Circuit Protectors & NFB on of SYSTEM CONTROLLE
④ Set Power Switch on of OPERATION PANEL
⑤ Confirm PLC/NC status by RUN LED color (RED)
3-2. POWER OFF
*** Please follow below sequence for Power Off Operation
① In automatic operation mode, set the OPERATION STOP switch on
after system halt.
② Shut off the power of control panel and other parts.
3-3. Preparation for system operation (Ready status for operation)
① Check powered system control panel
② Check alarm of main control panel and make proper countermeasure
if any
③ Pneumatic system, PLC should be in the normal status and no
emergency stop signal is input
Слайд 47

4. Manual Operation

4. Manual Operation

Слайд 48

4. Manual Operation 4-1.Condition of Manual Operation ◆ Switch to operation

4. Manual Operation 4-1.Condition of Manual Operation
◆ Switch to operation

preparation status following sequence
◆ Switch OPERATION PANEL MANUAL/AUTO S/W to MANUAL
◆ Each mechanism can be operated by touch panel as described on chapter 2.
Notice) Each Software is programmed as Flip-Flop Sequence
Слайд 49

5. Automatic Operation

5. Automatic Operation

Слайд 50

5. Automatic Operation 5-1. Condition ◆ Automatic Operation is available only

5. Automatic Operation
5-1. Condition
◆ Automatic Operation is available only

when whole machine is at the original location.
Be sure to check if cassettes and wafers are properly loaded
5-2. Automatic Operation
◆ Initiate automatic operation in sequence when necessary condition is satisfied.
5-2-1. Automatic Operation Start
- AUTO START = Mount wafers on ceramic block with liquid wax
Be sure to stay out of work space during operation
5-3. Stop and Closing of Automatic Operation
◆ Press RESET button longer than one second after operation cycle completed.
5-4. Emergency Stop Operation
- OP Stop, Emergency Stop = System Stop
◆ For emergency stop, press Emergency S/W to halt the system
◆ Release : Press RESET or switch to manual mode to release from emergency stop mode
Слайд 51

6. MAINTENANCE

6. MAINTENANCE

Слайд 52

6. MAINTENANCE 6-1. Jig Exchange method PUSHER - Move PUSHER to

6. MAINTENANCE
6-1. Jig Exchange method
PUSHER
- Move PUSHER to

oriianl postition
2) SPIN CHUCK COVER
- SPIN PART Exchange for 2”
4” operation (Remove for 8”)
3) STAMP
- STAMP EXchange
4) PUSER HEIGHT JIG
- PUSHER HEIGHT
EXchange
Слайд 53

6-2. WAX TANK, DISPENSING VALVE * WAX TANK - MODEL :


6-2. WAX TANK, DISPENSING VALVE
* WAX TANK
- MODEL

: JB03-LRG
- Recommended Air Pressure : 2~3 gf/cm2
- Releasing of alarm and Buzzer :
Reset & Wax recharge
* DISPENSING VALVE
- MODEL : SV501
- Max Fluid Pressure : 7 kgf/cm2
- Max air pressure : 7 kgf/cm2
- Effective Temp. Range : 5℃ ~ 43℃
- NEEDLE NOZZLE : 17
Слайд 54

6-3. Regulator 1) STAMP - Usage Pressure 4 INCH : 0.03


6-3. Regulator
1) STAMP
- Usage Pressure
4 INCH :

0.03 Mpa
6 INCH : 0.04 Mpa
8 INCH : 0.03 ~ 0.04 Mpa
2) ROTATION CUSION
- Usage Pressure
4 , 6 , 8INCH : 0.03 MPa
Слайд 55

6-4. HEATER / VACUUM / BLOCK TEMP. 1) OPERATE PANEL HEATER


6-4. HEATER / VACUUM / BLOCK TEMP.
1) OPERATE

PANEL HEATER SETTING
- BAKE HEATER : 180~200℃
- PRE.HEATER : 80~110℃
- INDEX HEATER : 80~110℃
2) VACUUM SET / CERAMIC BOLCK TEMP. SET
- SPINNIG : -30.0 Kpa
- WAFER SWING : -30.0 Kpa
- CERAMIC BLOCK : 80~90℃
Слайд 56

6-5. BAKE HEATER / STAMP gap setting 1) BAKE HEATER SETTING


6-5. BAKE HEATER / STAMP gap setting
1) BAKE

HEATER SETTING
- Secure about 1~2mm gap between the bake heater and wafer
2) STAMP SETTING
Secure about 3mm gap between the ceramic block and stamp
(use the 3t silicon PAD)
Слайд 57

6-6. MAINTENANCE LIST.


6-6. MAINTENANCE LIST.

Слайд 58

7. PLC PROGRAM

7. PLC PROGRAM

Слайд 59

8. PLC I/O

8. PLC I/O

Слайд 60

9. Electric Circuit Drawing

9. Electric Circuit Drawing

Слайд 61

10. Overall Assembly Drawing

10. Overall Assembly Drawing

Слайд 62

11. Partial Assembly Drawing (Including Parts List)

11. Partial Assembly Drawing (Including Parts List)

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